JEOL 7600F PDF

July 31, Peabody, Mass. Featuring the highest beam current available on any FEG SEM, the JSMF integrates a semi-in-lens objective lens with an in-lens thermal electron gun, providing superior imaging of nonconductive samples that traditionally charge, such as photomasks, ceramics, and glass. This new SEM minimizes beam damage on heat sensitive samples such as low-K dielectrics, and offers improved stability for long-term, unattended data acquisition metrology, particle analysis, defect review, EBSD, and x-ray mapping. A new Graphical User Interface enables easy navigation through imaging and analyzing procedures. The JSMF is capable of high resolution high sensitivity analysis under any combination of operating conditions for various samples and research requirements, with guaranteed resolution at high accelerating voltage of 1. The JSMF is a powerful tool combining high resolution imaging and high speed analysis.

Author:Dirn Zulumuro
Country:Solomon Islands
Language:English (Spanish)
Genre:History
Published (Last):20 March 2010
Pages:184
PDF File Size:8.65 Mb
ePub File Size:3.24 Mb
ISBN:445-2-86217-830-3
Downloads:84228
Price:Free* [*Free Regsitration Required]
Uploader:Mulkree



July 31, Peabody, Mass. Featuring the highest beam current available on any FEG SEM, the JSMF integrates a semi-in-lens objective lens with an in-lens thermal electron gun, providing superior imaging of nonconductive samples that traditionally charge, such as photomasks, ceramics, and glass.

This new SEM minimizes beam damage on heat sensitive samples such as low-K dielectrics, and offers improved stability for long-term, unattended data acquisition metrology, particle analysis, defect review, EBSD, and x-ray mapping. A new Graphical User Interface enables easy navigation through imaging and analyzing procedures. The JSMF is capable of high resolution high sensitivity analysis under any combination of operating conditions for various samples and research requirements, with guaranteed resolution at high accelerating voltage of 1.

The JSMF is a powerful tool combining high resolution imaging and high speed analysis. Utilizing the electron beam finely focused at low accelerating voltage and high probe current, the microscope, when outfitted with an EDS detector, can rapidly acquire high resolution X-ray mapping data.

The JSMF incorporates a through-the-lens detection system that features a new energy filter, r-filter, designed to vary the mixture rate of secondary electron and backscattered electron images, enhancing the topography or compositional differences of images as needed.

Gentle beam mode improves low kV image resolution. The user interface is designed to collectively define, save, and retrieve photographing and imaging conditions to facilitate data acquisition under optimum conditions. It also supports simultaneous acquisition of 4 different types of images, significantly improving throughput. The standard 5-axis motor drive eucentric stage controls sample movement seamlessly throughout the magnification range from 25x to 1,,x.

Intuitive specimen control by the track ball assures smooth movement of the area of view in high magnification imaging. The JSM specimen chamber accommodates samples up to mm in diameter, and features a complete set of detector ports secondary electron detector, backscattered electron detector, EDS, WDS, EBSD, and cathode luminescence detector, allowing the user to select an arrangement optimum to their analytical objectives.

Skip to content Share This

FAREWELL TO MANZANAR EXCERPT PDF

Field Emission Scanning Electron Microscope JEOL JSM-7600F

The SEM will be remotely operated from JEOL's booth to demonstrate ultrahigh imaging resolution at up to 1,,X magnification, and X-ray analytical mapping of individual layers, elemental composition, contaminants, particulates, and process defects in semiconductor devices. The only fully-analytical field emission SEM to feature a large chamber with large specimen exchange airlock and LN2 anti-contaminator, the JSMF accommodates specimens up to mm in diameter, and features a highly stable 5-axis motor drive eucentric stage that can be tilted from -5 to 70o. The microscope's electron column produces the highest beam current available on any FEG SEM, and provides superior imaging of nonconductive samples that traditionally charge. The JSMF minimizes beam damage on heat sensitive samples, i. The JEOL JSMF is fully outfitted for comprehensive analysis techniques and can simultaneously view and acquire images and data from four different types of imaging detectors. The SEM also does double duty as a direct write e-beam lithography tool when outfitted with a high speed beam blanker and a pattern generator see previous release at www. JEOL has 60 years of expertise in the field of electron microscopy, more than 50 years in mass spectrometry and NMR spectrometry, and more than 40 years of e-beam lithography leadership.

ABATORUL 5 PDF

Cryo SEM – JEOL 7600F with Gatan Alto and Horiba CL Detector

A semi in-lens SEM with high resolution. The adoption of a High Power Optics irradiation system delivers high-resolution, high-speed, high-accuracy element analysis. The incorporation of the Gentle Beam enables top-surface imaging of a specimen at very low energies of several hundred eV. Semi-in-lens provides high-resolution observation and analysis High resolution observation and high spatial resolution analysis is achieved through the combination of a semi-in-lens type objective lens that can collimate the electron beam even at low accelerating voltages, and the in-lens Schottky electron source that provides a stable current over a long service life. Gentle Beam GB provides top-surface imaging with ultra-low energy incident electrons A Gentle Beam GB mode with better resolution than the normal mode is available. In GB mode a bias voltage is applied to the specimen while the electron beam is emitted, allowing top-surface imaging with only several hundred eV of incident electron, making it possible to obtain high resolution images of samples that have been difficult to observe until now. High Power Optics delivers high-speed, high-precision analysis High Power Optics are adopted for the optical system, providing not only high-resolution imaging, but also stably delivering high-speed, high-precision analysis, including element analysis.

EPOC EXACERBADO PDF

Field Emission SEM 2 (JEOL 7600F)

.

HISTORIA PISCIUM PDF

Jeol Field Emission Scanning Electron Microscope JSM-7600F

.

Related Articles